Role of hydrogen in the growth of hydrogenated microcrystalline silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Role of Hydrogen Atoms in the Formation Process of Hydrogenated Microcrystalline Silicon
2. Subsurface hydrogenated amorphous silicon to μc‐hydrogenated silicon transformation during magnetron sputter deposition determined by spectroscopic ellipsometry
3. Two‐photon laser‐induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane discharge
4. T. Arai and H. Shirai, Jpn. Appl. Phys., in press.
5. Surface Morphology and Crystallite Size during Growth of Hydrogenated Microcrystalline Silicon by Plasma-Enhanced Chemical Vapor Deposition
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1. Non-intrusive plasma diagnostics for the deposition of large area thin film silicon;Thin Solid Films;2009-10
2. Deposition of nanocrystalline silicon films at room temperature;Journal of Applied Physics;2007-08-15
3. Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H2discharges;Plasma Sources Science and Technology;2006-11-24
4. State distribution in hydrogenated microcrystalline silicon;Physical Review B;2004-01-16
5. Thermal stability and hydrogen atom induced etching of nanometer-thicka-Si:H films grown by ion-beam deposition on Si(100) surfaces;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2003-07
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