A cost-effective flexible MEMS technique for temperature sensing

Author:

Xiao Suyan,Che Lufeng,Li Xinxin,Wang Yuelin

Publisher

Elsevier BV

Subject

General Engineering

Reference13 articles.

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2. Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors;Han;sensors Actuators A,2002

3. Flexible circuit and sensor arrays fabricated by monolithic silicon technology;Barth;IEEE Transducers Electron. Device,1985

4. A flexible polyimide based package for silicon sensor;Beebe;sensors Actuatorss A,1994

5. A flexible micromachine-based shear-stress sensor array and its application to separation point detection;Jiang;sensors Actuatorss A,2000

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