Analog-CMDA based interfaces for MEMS gyroscopes

Author:

Giomi E.,Fanucci L.,Rocchi A.

Publisher

Elsevier BV

Subject

General Engineering

Reference36 articles.

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2. Inertial MEMS: Principles and Practice;Kempe,2011

3. M. Lobur, A. Holovatyy, Overview and analysis of readout circuits for capacitive sensing in MEMS gyroscopes (MEMS Angular Velocity Sensors), in: MEMSTECH International Conference, 2009, pp. 161–163.

4. Five-axis motion sensor with electrostatic drive and capacitive detection fabricated by silicon bulk micromachining;Watanabe;Sens. Actuators, A,2002

5. Control of a Z-axis MEMS vibrational gyroscope;Oboe;IEEE/ASME Trans. Mechatron.,2005

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