Author:
Luo Cheng,Meng Fang,Liu Xinchuan,Guo Yiyun
Reference29 articles.
1. A. Gadre, M. Kastantin, S. Li, R. Ghodssi, An integrated BioMEMS fabrication technology, Proceedings of International Semiconductor Device Research Symposium, 2001, pp.186–189.
2. PDMS material safety data sheets: http://www.polyscience.com/know/msds/dow/dow_corning_200_fluid_10_cst.pdf.
3. The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications;Löttersy;J. Micromech. Microeng.,1997
4. Three-dimensional micro-channel fabrication in Polydimethylsiloxane (PDMS) elastomer;Jo;J. Microelectromech. Syst.,2000
5. B.D. Debusschere, D.A. Borkholder, G.T.A. Kovacs, Design of an integrated silicon-PDMS cell cartridge, Proceedings of Solid-State Sensor Actuators Workshop, Hilton Head, June 1998, pp. 358–362.
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