Modeling and fabrication of a microelectromechanical microwave switch-Reference-Cited by-同舟云学术

Modeling and fabrication of a microelectromechanical microwave switch

Published:2007-04 Issue:4-5 Volume:38 Page:519-524
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Dai Ching-Liang,Hsu Heng-Ming,Tsai Ming-Chang,Hsieh Ming-Ming,Chang Ming-Wei

Publisher

Elsevier BV

Subject

General Engineering

Reference16 articles.

1. A low-voltage actuated micromachined microwave switch using torsion springs and leverage

2. Review of radio frequency microelectromechanical systems technology

3. RF MEMS switches and switch circuits

4. C.V. Jahnes, J. Cotte, J.L. Lund, H. Deligianni, A. Chinthakindi, L.P. Buchhalter, P. Fryer, J.A. Tornello, N. Hoivik, J.H. Magerlein, D. Seeger, in: IEEE International Conference of Micro Electro Mechanics Systems, 2004, pp. 782–792.

5. MEMS switches

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