Design, fabrication and characterization of a bistable electromagnetic microrelay with large displacement-Reference-Cited by-同舟云学术

Design, fabrication and characterization of a bistable electromagnetic microrelay with large displacement

Published:2011-08 Issue:8 Volume:42 Page:992-998
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Miao Xiaodan,Dai Xuhan,Wang Peihong,Ding Guifu,Zhao Xiaolin

Publisher

Elsevier BV

Subject

General Engineering

Reference17 articles.

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3. A bulk-micromachined bi-stable relay with U-shaped thermal actuators;Qiu;J. Microelectromech. Syst.,2005

4. A monolithic variable inductor network using micro-relays with combined thermal and electrostatic actuation;Zhou;J. Micromech. Microeng.,1999

5. A low-voltage and low-power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces;Cho;IEEE Trans. Microwave Theory Tech.,2005

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