A low-power monolithic three-axis accelerometer with automatically sensor offset compensated and interface circuit

Author:

Yeh Chih Yuan,Huang Jung Tang,Tseng Sheng-Hsiang,Wu Po-Chang,Tsai Hann-Huei,Juang Ying-Zong

Funder

National Chip Implementation (CIC) and UMC Ltd

Publisher

Elsevier BV

Subject

General Engineering

Reference21 articles.

1. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics;Lemkin;IEEE J. Solid State Circuits,1999

2. A low-noise low offset capacitive sensing amplifier for a 50-μg/rtHz monolithic CMOS MEMS accelerometer;Wu;IEEE J. Solid State Circuits,2004

3. A fourth-order ΔΣ interface for micromachined inertial sensors;Petkov;IEEE J. Solid State Circuits,2005

4. A micropower interface ASIC for a capacitive 3-axis micro-accelerometer;Paavola;IEEE J. Solid State Circuits,2007

5. A monolithic CMOS-MEMS 3-axis accelerometer with a low-noise, low power dual-chopper amplifier;Qu;IEEE Sens. J.,2008

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