Fabrication and performance of a micromachined 3-D solenoid inductor-Reference-Cited by-同舟云学术

Fabrication and performance of a micromachined 3-D solenoid inductor

Published:2006-09 Issue:9 Volume:37 Page:948-951
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Fang Dong-Ming,Wang Xi-Ning,Zhou Yong,Zhao Xiao-Lin

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Surface micromachined solenoid on-Si and on-glass inductors for RF applications;Yoon;IEEE Electron Dev. Lett.,1999

2. A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate;Yung;IEEE Electron Dev Lett,2002

3. Integrated solenoid inductors with patterned sputter-deposited Cr/Fe10Co90/Cr ferromagnetic cores;Zhang;IEEE Electron Dev. Lett.,2003

4. K. Itoi, M. Sato, H. Abe, H. Ito, H. Sugawara, K. Okada, K. Masu, T. Ito, On-chip high-Q solenoid inductors embedded in WL-CSP, Proceedings of HDP, 2004. pp.105-108.

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