The properties of aluminum, platinum silicide and copper based contacts for silicon high-power devices
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Published:2006-03
Issue:3
Volume:37
Page:236-242
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ISSN:0026-2692
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Container-title:Microelectronics Journal
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language:en
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Short-container-title:Microelectronics Journal
Author:
Vobecký J.,Kolesnikov D.
Subject
General Engineering