Formation of dense nanostructures on femtosecond laser-processed silicon carbide surfaces-Reference-Cited by-同舟云学术

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Formation of dense nanostructures on femtosecond laser-processed silicon carbide surfaces

Published:2022-02 Issue: Volume:28 Page:101624
ISSN:2468-0230
Container-title:Surfaces and Interfaces
language:en
Short-container-title:Surfaces and Interfaces

Author:

Long Jiangyou,He Ziyu,Ou Deyi,Huang Yajun,Wang Pengchao,Ren Qinglei,Xie Xiaozhu

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,General Physics and Astronomy,Condensed Matter Physics,Surfaces and Interfaces,General Chemistry

Reference30 articles.

1. Silicon carbide as a new MEMS technology;Sarro;Sens. Actuators A Phys.,2000

2. High-temperature single-crystal 3C-SiC capacitive pressure sensor;Young;IEEE Sens. J.,2004

3. Simulation, fabrication and testing of bulk micromachined 6h-SiC high-g piezoresistive accelerometers;Atwell;Sens. Actuators A Phys.,2003

4. Silicon carbide benefits and advantages for power electronics circuits and systems;Elasser;Proc. IEEE,2002

5. Role of wide bandgap materials in power electronics for smart grids applications;Ballestín-Fuertes;Electron,2021

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1. Grooved-porous composite wick structures for highly efficient capillary-fed boiling heat transfer;Applied Thermal Engineering;2024-11

2. Study of damage mechanism on single crystal 4H-SiC surface layer by picosecond laser modification (PLM);Applied Surface Science;2024-11

3. A review of ultra-short pulse laser micromachining of wide bandgap semiconductor materials: SiC and GaN;Materials Science in Semiconductor Processing;2024-09

4. Coating-assisted picosecond laser ablation for microstructure fabrication of SiC ceramics;Optics Express;2024-07-09

5. Surface micromorphology and nanostructures evolution in hybrid laser processes of slicing and polishing single crystal 4H-SiC;Journal of Materials Science & Technology;2024-06

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