Large scale PIV-measurement to evaluate the flow isolation device (FID) efficiency in the stocker room of wafer masks

Author:

Lin Tee,Zargar Omid Ali,Lin Che-Yu,Lai Ting-Jun,Shih Yang-Cheng,Hu Shih-Cheng,Leggett Graham

Publisher

Elsevier BV

Subject

Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics

Reference17 articles.

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4. An experimental study of the flow characteristics and velocity fields in an operating room with laminar airflow ventilation;Lin;J. Build. Eng.,2020

5. Indoor airflow and pollutant spread inside the cleanroom with micro-porous supplying panel and different ventilation schemes: analytical, numerical and experimental investigations;Zhao;J. Build. Eng.,2020

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