Groove depth dependence of IR transmission spectra through silicon gratings: experiment versus theory
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Diffraction gratings for color filtering in the zero diffraction order
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3. Multilayer modal method for diffraction gratings of arbitrary profile, depth, and permittivity
4. Operator approach to electromagnetic coupled-wave calculations of lamellar gratings: infrared optical properties of intrinsic silicon gratings
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