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Direct writing via electron-driven reactions

Published:2013-04 Issue:4 Volume:16 Page:117-122
ISSN:1369-7021
Container-title:Materials Today
language:en
Short-container-title:Materials Today

Author:

Lee Seung Whan,Sankaran R. Mohan

Funder

Defense Advanced Research Program Agency (DARPA)

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference69 articles.

1. Gas-assisted focused electron beam and ion beam processing and fabrication

2. Handbook of Microlithography, Micromachining, and Microfabrication;McCord,1997

3. AlF3—A new very high resolution electron beam resist

4. Metal deposition by electron beam exposure of an organometallic film

5. High-resolution electron-beam patternable nanocomposite containing metal nanoparticles for plasmonics

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1. Direct Writing of Fluorescent Patterns of Rare-Earth-Doped Nanophosphors by Microplasma Jet;Industrial & Engineering Chemistry Research;2024-03-06

2. Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review;Advanced Engineering Materials;2022-02-18

3. Microfluidic plasmas: Novel technique for chemistry and chemical engineering;Chemical Engineering Journal;2021-08

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5. Electron Beam Patterning of Metal–Organic Frameworks;Chemistry of Materials;2021-01-11

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