1. J.M. Lafferty (Ed.), Foundations of Vacuum Science and Technology, Wiley, New York, 1998.
2. Vacuum Technology 2002, Pfeiffer Vacuum GmbH, Emmeliusstrasse 33, D-35614 Asslar, Germany.
3. Hiden HPR-30 Series Process Gas Analysers, Hiden Analytical Ltd., 420 Europa Boulevard, Warrington WA5 5UN, England.
4. HPR-60 Molecular Beam Radicals & Neutrals Measurement System, Hiden Analytical Ltd., 420 Europa Boulevard, Warrington WA5 5UN, England.
5. Gas‐phase composition measurements during chlorine assisted chemical vapor deposition of diamond: A molecular beam mass spectrometric study