Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data-Reference-Cited by-同舟云学术

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Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data

Published:2015-11 Issue: Volume:217 Page:119-124
ISSN:1387-1811
Container-title:Microporous and Mesoporous Materials
language:en
Short-container-title:Microporous and Mesoporous Materials

Author:

Lépinay Matthieu,Broussous Lucile,Licitra Christophe,Bertin François,Rouessac Vincent,Ayral André,Coasne Benoit

Publisher

Elsevier BV

Subject

Mechanics of Materials,Condensed Matter Physics,General Materials Science,General Chemistry

Reference29 articles.

1. Synthesis, Characterization and Applications of Mesostructured Thin Layers,2006

2. Electron. Devices Meeting (IEDM);Arnaud,2011

3. Dielectric Films for Advanced Microelectronics,2007

4. Porous Dielectrics in Microelectronic Wiring Applications

5. Adsorption by Powders and Porous Solids: Principles, Methodology and Applications,1998

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1. Computational Analysis of the Effects of Nanoscale Confinement on the Structure of Low-k Dielectric Hybrid Organosilicate Materials;IEEE Transactions on Materials for Electron Devices;2024

2. Challenges in porosity characterization of thin films: Cross-evaluation of different techniques;Journal of Vacuum Science & Technology A;2023-07-20

3. Excellent catalytic performance over hierarchical ZSM-48 zeolite: Cooperative effects of enhanced mesoporosity and highly-accessible acidity;Fuel;2022-09

4. Porous SiOCH thin films for gravimetric gas sensors;Microporous and Mesoporous Materials;2022-01

5. Preparation of Monodispersed Nanoporous Eu(III)/Titania Loaded with Ibuprofen: Optimum Loading, Luminescence, and Sustained Release;Inorganic Chemistry;2021-06-03

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