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Erosion of a-C:D thin films by low energy D+, D2+, and D3+ ion beam irradiation

Author:

Meyer F.W.,Harris P.R.,Zhang H.,Jacob W.,Schwarz-Selinger T.,von Toussaint U.

Funder

Office of Fusion Energy Sciences and the Office of Basic Energy Sciences of the US Department of Energy

Publisher

Elsevier BV

Subject

Nuclear Energy and Engineering,General Materials Science,Nuclear and High Energy Physics

Reference16 articles.

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2. Chemical sputtering of deuterated carbon surfaces at various surface temperatures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-06

3. Molecular size effect in the chemical sputtering of a-C:H thin films by low energy H+, , and ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-06