Erosion of tungsten-doped amorphous carbon films in oxygen plasma
Author:
Publisher
Elsevier BV
Subject
Nuclear Energy and Engineering,General Materials Science,Nuclear and High Energy Physics
Reference34 articles.
1. Tritium inventory in ITER plasma-facing materials and tritium removal procedures
2. Redeposition of hydrocarbon layers in fusion devices
3. Plasma-material interactions in current tokamaks and their implications for next step fusion reactors
4. Oxygen glow discharge cleaning in ASDEX Upgrade
5. The first results of O-ICR experiments to remove re-deposited layers and hydrogen in the HT-7 superconducting tokamak
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1. Study of Tungsten-Doped Carbon Hard Mask Etch Process Using NF3/O2 Based Chemistry;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17
2. Deuterium Removal from W-Doped Carbon Films by Thermo-Oxidation;Fusion Science and Technology;2018-01-22
3. Thermo-oxidation of laboratory-produced undoped and W-doped carbon films: A reaction product analysis;Nuclear Materials and Energy;2017-08
4. Deuterium diffusion and retention in a tungsten–carbon multilayer system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-06
5. Deuterium retention in tungsten-doped amorphous carbon films exposed to deuterium plasma;Journal of Nuclear Materials;2013-07
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