Effects of grain orientation on hillock formation and grain growth in aluminum films on silicon substrates
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Published:1992-08
Issue:3
Volume:27
Page:285-290
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ISSN:0956-716X
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Container-title:Scripta Metallurgica et Materialia
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language:en
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Short-container-title:Scripta Metallurgica et Materialia
Author:
Sanchez J.E.,Arzt E.
Subject
General Engineering
Cited by
132 articles.
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