Modeling temporal dual variations for return air temperature prediction of mK-level temperature-controlled clean chamber-Reference-Cited by-同舟云学术

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Modeling temporal dual variations for return air temperature prediction of mK-level temperature-controlled clean chamber

Published:2024-06 Issue: Volume:86 Page:108917
ISSN:2352-7102
Container-title:Journal of Building Engineering
language:en
Short-container-title:Journal of Building Engineering

Author:

Yu Hangcheng,Dong He,Zeng Zhibo^ORCID,Cao Di,Zhang Wei,Wang Pan^ORCID,Li Xiaoping

Publisher

Elsevier BV

Reference56 articles.

1. Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry;Schmidt;Phil. Trans. R. Soc. A,2012

2. Thermal effect on the dynamic error of a high-precision worktable;Zou;Arch. Civ. Mech. Eng.,2017

3. Optimization and temperature mapping of an ultra-high thermal stability environmental enclosure;Zhao;Precis. Eng.,2010

4. Application of microscopic interferometry techniques in the MEMS field;Bosseboeuf,2003

5. Life cycle assessment of cleanroom for micro-electro-mechanical systems fabrication with insights on sustainability;Vutla;J. Clean. Prod.,2021

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