Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties-Reference-Cited by-同舟云学术

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Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties

Published:2023-03 Issue: Volume:612 Page:155697
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Shibalov M.V.,Sirotina A.P.,Pershina E.A.,Martovitskii V.P.,Shibalova A.A.,Mumlyakov A.M.,Trofimov I.V.,Timofeeva E.R.,Porokhov N.V.,Zenova E.V.,Tarkhov M.A.

Funder

Ministry of Education and Science of the Russian Federation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference57 articles.

1. Supraleitfähige Verbindungen mit extrem hohen Sprungtemperaturen (NbH und NbN);Aschermann,1943

2. Transition temperatures and upper critical fields of NbN thin films fabricated at room temperature;Hwang;Progr. Superconduct. Cryogen.,2015

3. Current-induced critical state in NbN thin-film structures;Il’in;J. Low Temp. Phys.,2008

4. Investigation of the superconducting properties of NbN films deposited by DC magnetron sputtering on a high-k dielectric HfO2 buffer layer;Porokhov;Supercond. Sci. Technol.,2021

5. NbN single-photon detectors with saturated dependence of quantum efficiency;Smirnov;Supercond. Sci. Technol.,2018

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