Pulsed laser deposition of aluminum nitride thin films for FBAR applications-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Pulsed laser deposition of aluminum nitride thin films for FBAR applications

Published:2007-07 Issue:19 Volume:253 Page:8151-8154
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Cibert C.,Chatras M.,Champeaux C.,Cros D.,Catherinot A.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference14 articles.

1. IEEE Ultrasonics Symposium;Osbond,1999

2. Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (100) substrate for FBAR

3. Fabrication and performance analysis of film bulk acoustic wave resonators

4. Comparative study of c-axis AlN films sputtered on metallic surfaces

5. IEEE Ultrasonics Symposium;Iriarte,2002

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Growth and performance analysis of BAlN alloy thin film on Al substrate as a heat spreader for effective thermal management applications on white-based high-power LED;Applied Physics A;2021-06-19

2. Material epitaxy of AlN thin films;Ultrawide Bandgap Semiconductors;2021

3. Development of AlNB alloy in (Al/AlN/B) stacking sequence using RF reactive sputtering towards thermal management application;Journal of Materials Science: Materials in Electronics;2020-11-18

4. The Simulation of Resonant Mode and Effective Electromechanical Coupling Coefficient of Lithium Niobate Crystal with Different Orientations;Journal of Physics: Conference Series;2020-09-01

5. A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition;APL Materials;2020-07-01

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3