Author:
Loo Roger,Caymax Matty,Meunier-Beillard Philippe,Peytier Ivan,Holsteyns Frank,Kubicek Stefan,Verheyen Peter,Lindsay Richard,Richard Olivier
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference9 articles.
1. M.C. Öztürk, N. Pesovic, J. Liu, H. Mo, I. Kang, S. Gannavaram, in: Electrochemical Society Proceedings Volume 2002–2, p. 761.
2. Enabling technologies for forming and contacting shallow junctions in Si: HF-vapor cleaning and selective epitaxial growth of Si and SiGe
3. S. Gannavaram, N. Pesovic, M. C. Öztürk, in: Proceedings of the IEDM 2000, p. 437.
4. R. Loo, M. Caymax, O. Richard, P. Verheyen, N. Collaert, in: Proceedings of UCPSS 2002, Solid State Phenomena 92 (2003) pp. 199–202.
5. M. Meuris, et al., in: Proceedings of the 1999 IEEE International Symposium on Semiconductor Manufacturing, p. 157.
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