Spectroscopic characterization of TiCx films produced by pulsed laser deposition in CH4 environments
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference21 articles.
1. S.T. Oyama, Introduction to the chemistry of transition metal carbides and nitrides, in: S.T. Oyama (Ed.), The Chemistry of Transition Metal Carbides and Nitrides, Blackie Academic and Professional, London, 1996, pp. 1–27.
2. A.T. Santhenam, Application of transition metal carbides and nitrides in industrial tools, in: S.T. Oyama (Ed.), The Chemistry of Transition Metal Carbides and Nitrides, Blackie Academic and Professional, London, 1996, pp. 28–52.
3. Growth of TiC films by thermal laser-assisted chemical vapour deposition
4. Pyrolytic laser-based chemical vapour deposition of TIC coatings
5. Preparation of crystalline TiC thin films grown by pulsed Nd:YAG laser deposition using Ti target in methane gas
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