Nonhomogeneous surface properties of parylene-C film etched by an atmospheric pressure He/O2 micro-plasma jet in ambient air-Reference-Cited by-同舟云学术

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Nonhomogeneous surface properties of parylene-C film etched by an atmospheric pressure He/O2 micro-plasma jet in ambient air

Published:2016-10 Issue: Volume:383 Page:261-267
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Wang Tao,Yang Bin,Chen Xiang,Wang Xiaolin,Yang Chunsheng,Liu Jingquan

Funder

National Natural Science Foundation of China

973 Program

SRFDP

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference34 articles.

1. Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures;Zhang;Microelectron. Eng.,2015

2. PDMS-based micro PCR chip with parylene coating;Shin;J. Micromech. Microeng.,2003

3. Encapsulation of an integrated neural interface device with Parylene C;Hsu;IEEE Trans. Bio-med. Eng.,2009

4. Wafer-level parylene packaging with integrated RF electronics for wireless retinal prostheses;Li;J. Microelectromech. Syst.,2010

5. Plasma removal of Parylene C;Meng;J. Micromech. Microeng.,2008

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1. Investigation on Localized Etching Behaviors of Polymer Film by Atmospheric Pressure Plasma Jets;Plasma Chemistry and Plasma Processing;2023-02-13

2. Influence of ring electrodes covered with dielectric layer on the characteristics of atmospheric pressure plasma jet and its interaction with polymer surface;Applied Surface Science;2022-05

3. Study of uniformity of atmospheric pressure plasma microjet array for maskless parallel micropatterned etching;Plasma Processes and Polymers;2022-01-15

4. Investigation on Different Etching Behaviors of Polymer Surface by Plasma Jets at Atmospheric Condition;SSRN Electronic Journal;2022

5. Effect of metal mesh addition on polymer surface etching by an atmospheric pressure plasma jet;Applied Surface Science;2021-12

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