Controlling precursor stability and evaporation through molecular design. Pseudo single source precursor approach to MOCVD SrTiO3 thin films-Reference-Cited by-同舟云学术

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Controlling precursor stability and evaporation through molecular design. Pseudo single source precursor approach to MOCVD SrTiO3 thin films

Published:2011-01 Issue:6 Volume:257 Page:2281-2290
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Seisenbaeva Gulaim A.,Gohil Suresh,Kessler Vadim G.,Andrieux Michel,Legros Corinne,Ribot Patrick,Brunet M.,Scheid E.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference28 articles.

1. Dielectric properties of barium strontium titanate (BST)/yttrium aluminate (YAlO3) thick films under DC bias field

2. In situ growth of SrTiO3 thin films prepared by AACVD from strontium and titanium oxide bisdipivaloylmethanates

3. Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr β-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source

4. Liquid injection MOCVD of TiO2 and SrTiO3 thin films from [Ti(OPri)2(tbaoac)2]: Film properties and compatibility with [Sr(thd)2]

5. Molecular structure design and synthetic approaches to the heterometallic alkoxide complexes (soft chemistry approach to inorganic materials by the eyes of a crystallographer)

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation of charge transfer interaction in heterometallic precursors to control their surface reactivity for MOCVD of Pd-Cu alloy films;Applied Surface Science;2021-05

2. Synthesis and Thermal Behavior of Heteroleptic γ‐Substituted Acetylacetonate‐Alkoxides of Titanium;European Journal of Inorganic Chemistry;2021-04-30

3. Synthesis of Stoichiometric SrTiO3 and Its Carrier Doping from Air-Stable Bimetallic Complexes;Inorganic Chemistry;2021-01-22

4. Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films;Polyhedron;2020-11

5. The use of mixed-metal single source precursors for the synthesis of complex metal oxides;Chemical Communications;2020

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