A novel patterning effect during high frequency laser micro-cutting of hard ceramics for microelectronics applications-Reference-Cited by-同舟云学术

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A novel patterning effect during high frequency laser micro-cutting of hard ceramics for microelectronics applications

Published:2014-05 Issue: Volume:302 Page:163-168
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Savriama Guillaume,Jarry Vincent,Barreau Laurent,Boulmer-Leborgne Chantal,Semmar Nadjib

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference25 articles.

1. Ultrashort-pulse laser machining of dielectric materials;Perry;J. Appl. Phys.,1999

2. Laser micro-cutting of wide band gap materials;Savriama;AIP Conf. Proc.,2012

3. Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics;Gamaly;Phys. Plasmas,2002

4. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics;Stuart;Phys. Rev. B,1996

5. Interaction of Femtosecond Laser Pulses with Transparent Dielectrics (Ph.D. Dissertation);Schaffer,2001

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