Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics-Reference-Cited by-同舟云学术

Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics

Published:2006-09 Issue:23 Volume:252 Page:8243-8250
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Vervaet Alfons,Siau Sam,De Baets Johan,Manirambona Boniface

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference13 articles.

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4. Modeling of high-aspect ratio microdrilling of polymers with UV laser ablation;Tokarev;Appl. Surf. Sci.,2000

5. Molecular dynamics model for laser ablation and desorption of organic solids;Zhigilei;J. Phys. Chem. B,1997

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