Interlayer analysis of HfO2/SiO2/Si by SIMS and HRBS-Reference-Cited by-同舟云学术

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Interlayer analysis of HfO2/SiO2/Si by SIMS and HRBS

Published:2008-12 Issue:4 Volume:255 Page:1551-1554
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Sasakawa K.,Fujikawa K.,Toyoda T.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference2 articles.

1. ITRS 2006 update.

2. Monolayer analysis in Rutherford backscattering spectroscopy

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