Application of ellipsometry for the accurate oxide layer measurement on silicon spheres-Reference-Cited by-同舟云学术

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Application of ellipsometry for the accurate oxide layer measurement on silicon spheres

Published:2017-11 Issue: Volume:421 Page:624-629
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Busch Ingo,Liu Wende,Chen Chi,Luo Zhiyong,Koenders Ludger

Funder

State Key Lab of Digital Manufacturing Equipment & Technology

National Institute of Metrology

Committee of National Optical Metrological technology

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference21 articles.

1. Redefinition of the kilogram, ampere, kelvin and mole: a proposed approach to implementing CIPM recommendation 1 (CI-2005);Mills;Metrologia,2006

2. The watt balance: determination of the Planck constant and redefinition of the kilogram;Stock;Phil. Trans. R. Soc. A,2011

3. Determination of the Avogadro constant by counting the atoms in a 28Si crystal;Andreas;Phys. Rev. Lett.,2011

4. Critical review of the current status of thickness measurements for ultrathin SiO2 on Si ?Part V: Results of a CCQM pilot study;Seah;Surf. Interface Anal.,2004

5. Handbook of Optical Constants of Solids II;Palik,1991

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer;Thin Solid Films;2023-02

2. Investigating Stability of Si Sphere Surface Layer in Ambient–Vacuum Cyclic Measurements Using Ellipsometry;IEEE Transactions on Instrumentation and Measurement;2021

3. A quantum of action on a scale? Dissemination of the quantum based kilogram;Metrologia;2019-03-19

4. Spectroscopic ellipsometer study of laser ablation wavelength dependent growth kinetics of Ag nanoislands: An insight to potential plasmonic applications;Applied Surface Science;2018-07

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