Plasma combined self-assembled monolayer pretreatment on electroplated-Cu surface for low temperature Cu–Sn bonding in 3D integration

Author:

Wang Junqiang,Wang Qian,Wu Zijian,Tan Lin,Cai Jian,Wang Dejun

Funder

National Basic Research Program of China

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference31 articles.

1. Overview and outlook of through-silicon via (TSV) and 3D integrations;Lau;Microelectron. Int.,2011

2. Wafer-level three-dimensional integrated circuits (3D IC): Schemes and key technologies;Lai;Microelectron. Eng.,2011

3. Reliability of key technologies in 3D integration;Ko;Microelectron. Reliab.,2013

4. Low temperature bonding technology for 3D integration;Ko;Microelectron. Reliab.,2012

5. Reliable microjoints formed by solid-liquid interdiffusion (SLID) bonding within a chip-stacking architecture;Chang;IEEE Trans. CPMT,2012

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