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Spectroscopic ellipsometry characterization of coatings on biaxially anisotropic polymeric substrates

  • Published:2017-11 Issue: Volume:421 Page:500-507
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Hilfiker James N.,Pietz Brandon,Dodge Bill,Sun Jianing,Hong Nina,Schoeche Stefan

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference15 articles.

1. Spectroscopic Ellipsometry: Practical Applications to Thin Film Characterization;Tompkins,2016

2. Spectroscopic Ellipsometry: Principles and Applications;Fujiwara,2007

3. Theory and application of generalized ellipsometry;Schubert,2005

4. Advanced mueller ellipsometry instrumentation and data analysis;Garcia-Caurel,2013

5. Suppression of backside reflections from transparent substrates;Synowicki;Phys. Stat. Sol. C,2008
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