Molecular dynamics and experimental studies on deposition mechanisms of ion beam sputtering-Reference-Cited by-同舟云学术

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Molecular dynamics and experimental studies on deposition mechanisms of ion beam sputtering

Published:2008-03 Issue:11 Volume:254 Page:3436-3441
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Fang Te-Hua,Chang Win-Jin,Lin Chao-Ming,Lien Wen-Chieh

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference20 articles.

1. The Material Science of Thin Films;Ohring,1992

2. Thin Film Technology Handbook;Elshabini,1998

3. Properties of highly conducting ITO films prepared by ion plating

4. Microstructure and composition of MgF2 optical coatings grown on Si substrate by PVD and IBS processes

5. Ion plating — past, present and future

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3. Structural, Optical and Electrical Properties of ITO Thin Films;Journal of Electronic Materials;2017-11-20

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