Research on titanium nitride thin films deposited by reactive magnetron sputtering for MEMS applications-Reference-Cited by-同舟云学术

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Research on titanium nitride thin films deposited by reactive magnetron sputtering for MEMS applications

Published:2015-12 Issue: Volume:358 Page:525-532
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Merie Violeta^ORCID,Pustan Marius,Negrea Gavril,Bîrleanu Corina

Funder

Romanian Space Agency

Research Program for Space Technology Development

Innovation and Advanced Research – STAR

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference18 articles.

1. Surface/interface analysis and optical properties of RF sputter-deposited nanocrystalline titanium nitride thin films;White;Appl. Surf. Sci.,2014

2. Structural, optical and electrical properties of argon implanted TiN thin films;Popović;Int. J. Refract. Met. Hard Mater.,2015

3. Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings;Martinez;Ceram. Int.,2014

4. Titanium nitride electrodes for micro-gap discharge;Hsieh;Microelectron. J.,2006

5. Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films;Vasu;Appl. Surf. Sci.,2011

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improved SERS activity of TiN microstructures by surface modification with Au;Journal of Materials Science;2024-09-13

2. Adhesion and growth of titanium nitride coating deposited on AISI 316L using cylindrical magnetron sputtering;The Journal of Adhesion;2024-08-19

3. Selective strategy of reactive hysteresis loop for coatings on alloy substrates with different moduli;Journal of Vacuum Science & Technology A;2023-12-28

4. The Influence of Nitrogen Flow on the Stoichiometric Composition, Structure, Mechanical, and Microtribological Properties of TiN Coatings;Materials;2023-12-26

5. Cathodic arc deposition of nanocrystalline titanium nitride thin film on fluorine doped tin oxide coated glass substrate: Crystal structural, microstructural, mechanical, optical and electrical properties;Ceramics International;2023-12

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