Optical simulation, optimized design and fabrication of (ZrO2)x–(Al2O3)1−x composite films with thin inserted TiO2 layers for ArF-line high transmission attenuated phase shift mask blank applications-Reference-Cited by-同舟云学术

Optical simulation, optimized design and fabrication of (ZrO2)x–(Al2O3)1−x composite films with thin inserted TiO2 layers for ArF-line high transmission attenuated phase shift mask blank applications

Published:2005-11 Issue:4 Volume:252 Page:996-1005
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Lai Fu-Der

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference8 articles.

1. Design of 200-nm, 170-nm, and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask through simulation I

2. Optical superlattices—a strategy for designing phase-shift masks for photolithography at 248 and 193 nm: Application to AlN/CrN

3. Fabrication and characterization of aluminum oxide/chromium oxide superlattice for attenuated phase-shifting mask working at 193 nm wavelength

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical Property Analysis, Contour Map and Fabrication of SiO2/Cr/SiO2/Cr Multilayer Films for High Photo-Thermal Conversion Efficiency;Integrated Ferroelectrics;2020-08-05

2. Effect of the thickness of the individual layers in Al2O3/Pt/Al2O3 solar absorber films on the photo-thermal conversion efficiency for rapid industrial production;Surface and Coatings Technology;2020-05

3. Optical Properties, Contour Map and Fabrication of Al2O3/Pt/Al2O3/Ta Multilayer Films for Solar Selective Absorptance Layer;Science of Advanced Materials;2019-08-01

4. SiO2/Ti/SiO2 Three-layer Films Used as Solar Selective Absorber Layer in Heat Energy Collector;Integrated Ferroelectrics;2013-01

5. Optical Properties, Optimized Design and Fabrication of SiO2/W/SiO2 Films for Solar Selective Absorber;Integrated Ferroelectrics;2012-01