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Vibrational spectroscopy characterization of magnetron sputtered silicon oxide and silicon oxynitride films

  • Published:2009-10 Issue:1 Volume:256 Page:156-164
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Godinho V.,Denisov V.N.,Mavrin B.N.,Novikova N.N.,Vinogradov E.A.,Yakovlev V.A.,Fernández-Ramos C.,de Haro M.C. Jiménez,Fernández A.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference31 articles.

1. Infrared optical properties of silicon oxynitride films: experimental data and theoretical interpretation;Eriksson;J. Appl. Phys.,1986

2. Silicon rich oxynitride films for photoluminescence applications;Ribeiro;Thin Solid Films,2003

3. Study of the mechanical and structural properties of silicon oxynitride for optical applications;Criado;J. Non-Cryst. Sol.,2006

4. M. Arbad, P.A. Medwick, L.A. Miller, G.J. Marietti, Silicon oxynitride protective coatings, Patent: WO/1998/058885.

5. Optimal control on composition and optical properties of silicon oxynitride thin films;Samano;J. Vac. Sci. Technol. A,2005
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