Numerical investigation of sputtering power effect on nano-tribological properties of tantalum-nitride film using molecular dynamics simulation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference23 articles.
1. Stoichiometry behavior of TaN, TaCN and TaC thin films produced by magnetron sputtering;Vargas;Appl. Surf. Sci.,2013
2. Effects of low temperature on the characteristics of tantalum thin films;Dorranian;Vacuum,2011
3. Sputter deposition of bcc tantalum films with TaN underlayers for protection of steel;Gladczuk;Thin Solid Films,2005
4. Effect of sputtering parameters and substrate composition on the structure of tantalum thin films;Hallmann;Appl. Surf. Sci.,2013
5. Effect of substrate temperature on the properties of electron beam deposited tantalum films;Arshi;Thin Solid Films,2013
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