Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation-Reference-Cited by-同舟云学术

Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation

Published:2020-10 Issue: Volume:528 Page:146952
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Milov I.,Zhakhovsky V.,Ilnitsky D.,Migdal K.,Khokhlov V.,Petrov Yu.,Inogamov N.,Lipp V.,Medvedev N.,Ziaja B.,Medvedev V.,Makhotkin I.A.,Louis E.,Bijkerk F.

Funder

Ministerstvo Školství, Mládeže a Tělovýchovy

Russian Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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