Atomic-layer deposition of crystalline BeO on SiC-Reference-Cited by-同舟云学术

Atomic-layer deposition of crystalline BeO on SiC

Published:2019-03 Issue: Volume:469 Page:634-640
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Lee Seung Min,Jang Yoonseo,Jung Jongho,Yum Jung Hwan,Larsen Eric S.,Bielawski Christopher W.,Wang Weijie,Ryou Jae-Hyun,Kim Hyun-Seop,Cha Ho-Young,Oh Jungwoo

Funder

MSIT

IITP

NRF

Ministry of Education and the National Research Foundation of Korea

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference31 articles.

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2. CRC Handbook of Chemistry and Physics;Rankin,2009

3. Anharmonic interactions in beryllium oxide;Morell;Phys. Rev. B,1996

4. Investigation of atomic layer deposited beryllium oxide material properties for high-k dielectric applications;Koh;J. Vacuum Sci. Technol. B, Nanotechnol. Microelectron.: Mater. Process. Measur. Phenomena,2014

5. Thermal conductivity of BeO single crystals;Slack;J. Appl. Phys.,1971

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