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Molecular dynamic simulations of nanoindentation in aluminum thin film on silicon substrate

  • Published:2010-08 Issue:21 Volume:256 Page:6284-6290
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Peng Ping,Liao Guanglan,Shi Tielin,Tang Zirong,Gao Yang

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference26 articles.

1. Integrated tic coatings for moving MEMS;Radhakrishnan;Thin Solid Films,2002

2. Dlc-based wear protection on magnetic storage media;Schlatter;Diamond and Related Materials,2002

3. Wafer level anti-stiction coatings for MEMS;Ashurst;Sensors and Actuators A,2003

4. Performances of journal bearing with mos2-shot coating for spindle of magnetic recording storage system;Hirayama;Microsystem Technologies,2005

5. Substrate effects on indentation plastic zone development in thin soft films;Kramer;Journal of Materials Research,2001

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