Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering-Reference-Cited by-同舟云学术

Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering

Published:2011-11 Issue:3 Volume:258 Page:1261-1266
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Wang Szu-Ko,Lin Ting-Chun,Jian Sheng-Rui,Juang Jenh-Yih,Jang Jason S.-C.,Tseng Jiun-Yi

Funder

National Science Council of Taiwan

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference48 articles.

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5. Semiconductor Transparent Thin Films;Hartnagel,1995

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