Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100)-Reference-Cited by-同舟云学术

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Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100)

Published:2011-06 Issue:16 Volume:257 Page:7305-7309
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Huang Yue,Xu Yan,Ding Shi-Jin,Lu Hong-Liang,Sun Qing-Qing,Zhang David Wei,Chen Zhenyi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference18 articles.

1. Thin vapour-deposited niobium pentoxide films

2. Preparation and properties of spin-coated Nb2O5 films by the sol-gel process for electrochromic applications

3. Optical scattering characteristic of annealed niobium oxide films

4. Internal stress and optical properties of Nb_2O_5 thin films deposited by ion-beam sputtering

5. Amorphous Silicon Thin-Film Transistors Employing Photoprocessed Tantalum Oxide Films as Gate Insulators

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1. Ultra-High Photosensitivity of Nb2O5/Si Prepared by DC reactive Magnetron Sputtering Technique;2023-06-09

2. Synthesis of niobium pentoxide from bis(cyclopentadienyl) niobium(IV) dichloride using the spin coating process;Polyhedron;2022-07

3. Fabrication of Pd-Nb bimetallic doped organosilica membranes by different metal doping routes for H2/CO2 separation;Chinese Journal of Chemical Engineering;2021-08

4. Preparation and Characterization of NbxOy Thin Films: A Review;Coatings;2020-12-17

5. Palladium-niobium bimetallic doped organosilica membranes for H2/CO2 separation;Microporous and Mesoporous Materials;2020-10

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