Accurate detection of interface between SiO2 film and Si substrate-Reference-Cited by-同舟云学术

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Accurate detection of interface between SiO2 film and Si substrate

Published:2007-04 Issue:12 Volume:253 Page:5511-5515
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Qian H.X.,Zhou W.,Li X.M.,Miao J.M.,Lim L.E.N.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference7 articles.

1. Focused ion beam technology and applications

2. Integrated circuit repair using focused ion beam milling

3. Micromachining of semiconductor materials by focused ion beams

4. Application of a focused ion beam system to defect repair of VLSI masks

5. FIB endpoint detection and depth resolution

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1. Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures;Journal of Nanomaterials;2015

2. Focused ion beam strategy for nanostructure milling in doped silicon oxide layer for light trapping applications;Vacuum;2014-01

3. Photonic crystal electrode to be used in organic LED structures;Journal of the European Optical Society: Rapid Publications;2013-01-31

4. Gold nano-wires and nano-layers at laser-induced nano-ripples on PET;Applied Surface Science;2010-01

5. Focused ion beam irradiation of ZnO film: an atomic force microscopy study;Journal of Physics D: Applied Physics;2009-04-27

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