Molecular dynamics study of particle emission by reactive cluster ion impact
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference16 articles.
1. Non-linear processes in the gas cluster ion beam modification of solid surfaces
2. Gas cluster ion beam applications and equipment
3. Polishing of Sidewall Surfaces Using a Gas Cluster Ion Beam
4. High-speed Processing with Reactive Cluster Ion Beams
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1. The influence of landing points on the sputtering of mono-crystal solids due to cluster impacting;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-01
2. Molecular dynamics simulation study of damage formation and sputtering with huge fluorine cluster impact on silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-05
3. Temperature control in molecular dynamic simulations of non-equilibrium processes;Journal of Physics: Condensed Matter;2010-02-03
4. MD simulation study of the sputtering process by high-energy gas cluster impact;Applied Surface Science;2008-12
5. Sputtering of organic molecules by clusters, with focus on fullerenes;Applied Surface Science;2008-12
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