An XPS study and electrical properties of Pb1.1Zr0.53Ti0.47O3/PbO/Si (MFIS) structures according to the substrate temperature of the PbO buffer layer

Author:

Park Chul-Ho,Won Mi-Sook,Oh Young-Hun,Son Young-Gook

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference12 articles.

1. International Electron Device Meeting IEDM Technical Digest;Kinney,1987

2. International Electron Device Meeting IEDM Technical Digest;Carrano,1989

3. A new solid state resistor;Moll;IEEE Trans. Electron Devices ED-10,1963

4. Interaction of PbTiO3 films with Si substrate;Shichi;Jpn. J. Appl. Phys.,1994

5. Preparation of PbZrxTi1−xO3 films on Si substrates using SrTiO3 buffer layers;Tokumitsu;Int. Proc. Mater. Res. Soc. Symp.,1995

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