Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol

Author:

Zhang Dongshi,Gökce Bilal,Sommer Steffen,Streubel René,Barcikowski Stephan

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference33 articles.

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