High precision patterning of ITO using femtosecond laser annealing process
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference27 articles.
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3. Excimer laser beam/ITO interaction: from laser processing to surface reaction;Legeay;Phys. Status Solidi,2008
4. Mechanical and optoelectric properties of post-annealed fluorine-doped tin oxide films by ultraviolet laser irradiation;Tseng;Appl. Surf. Sci.,2011
5. Patterning crystalline indium tin oxide by high repetition rate femtosecond laser-induced crystallization;Cheng;Thin Solid Films,2010
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