Improved patterning of ITO coated with gold masking layer on glass substrate using nanosecond fiber laser and etching-Reference-Cited by-同舟云学术

Improved patterning of ITO coated with gold masking layer on glass substrate using nanosecond fiber laser and etching

Published:2015-05 Issue: Volume:336 Page:163-169
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Tan Nguyen Ngoc^ORCID,Hung Duong Thanh,Anh Vo Tran,BongChul Kang,HyunChul Kim

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference12 articles.

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3. Patterning indium tin oxide and indium zinc oxide using microcontact printing and wet etching;Breen;Langmuir,2002

4. Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels;Tseng;Appl. Surf. Sci.,2010

5. On the Mechanism of ITO Etching: The Specificity of Halogen Acids

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