Glass-on-LiNbO3 heterostructure formed via a two-step plasma activated low-temperature direct bonding method-Reference-Cited by-同舟云学术

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Glass-on-LiNbO3 heterostructure formed via a two-step plasma activated low-temperature direct bonding method

Published:2018-11 Issue: Volume:459 Page:621-629
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Xu Jikai,Wang Chenxi^ORCID,Tian Yanhong,Wu Bin,Wang Shang,Zhang He

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Heilongjiang Provincial Postdoctoral Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference35 articles.

1. Unprecedented electro-optic performance in lead-free transparent ceramics;Dupuy;Adv. Mater.,2016

2. Towards efficient surface acoustic wave (SAW)-based microfluidic actuators;Winkler;Sens. Actuators, A,2016

3. Surface modifications of crystal-ion-sliced LiNbO3 thin films by low energy ion irradiations;Bai;Appl. Surf. Sci.,2018

4. Interface and stability analysis of Tantalum-and Titanium nitride thin films onto Lithiumniobate;Vogel;Appl. Surf. Sci.,2017

5. Investigation of the interface between LiNbO3 and Si wafers bonded by laser irradiation;Takigawa;Jpn. J. Appl. Phys.,2017

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2. Preparation of LiNbO3 thin film on insulator for high-performance lithium niobate devices;Vacuum;2024-09

3. InP/LiNbO₃ Covalent Heterointerface Construction via an Asymmetric Plasma Activation Strategy for Hybrid Integrated Quantum Systems;ACS Applied Materials & Interfaces;2024-08-28

4. Development of Directly Bonded LiNbO₃ Plates and Microfabricated Quartz Crystal Structures;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

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