Modeling and simulation of surface roughness
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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3. A. Asenov, S. Kaya, Effect of oxide interface roughness on the threshold voltage fluctuations in decanano MOSFETs with ultrathin gate oxides, in: Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2000, 2000, pp. 135–138.
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