Low-temperature growth of InxGa1−xN films by radio-frequency magnetron sputtering
Author:
Funder
Beijing Municipal Commission
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference45 articles.
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4. Theoretical possibilities of InxGa1−xN tandem PV structures;Hamzaoui;Solar Energy Materials and Solar Cells,2005
5. Growth and characterization of InxGa1−xN alloys by metalorganic chemical vapor deposition for solar cell applications;Huang;Journal of Photonics for Energy,2012
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2. Study of the surface chemistry, surface morphology, optical, and structural properties of InGaN thin films deposited by RF magnetron sputtering;Applied Surface Science;2022-06
3. Changes of the Physical Properties of Sputtered InGaN Thin Films Under Small Nitrogen Gas Flow Variations;Journal of Electronic Materials;2019-02-12
4. Influence of substrate and substrate temperature on the structural, optical and surface properties of InGaN thin films prepared by RFMS method;Microelectronic Engineering;2019-02
5. Investigation of GaN/InGaN thin film growth on ITO substrate by thermionic vacuum arc (TVA);SN Applied Sciences;2018-10-12
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